Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8749757 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Nobutaka Magome, Naoyuki Kobayashi, Yasuyuki Sakakibara, Hiroaki Takaiwa | 2014-06-10 |
| 8451424 | Exposure apparatus, method for producing device, and method for controlling exposure apparatus | Nobutaka Magome, Naoyuki Kobayashi, Yasuyuki Sakakibara, Hiroaki Takaiwa | 2013-05-28 |
| 5161521 | Oscillation degree measuring apparatus | Yoichi Kasahara, Norio Kaneko | 1992-11-10 |