Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7990517 | Immersion exposure apparatus and device manufacturing method with residual liquid detector | Takashi Horiuchi | 2011-08-02 |
| 7990516 | Immersion exposure apparatus and device manufacturing method with liquid detection apparatus | Takashi Horiuchi | 2011-08-02 |
| 7973910 | Stage apparatus and exposure apparatus | — | 2011-07-05 |
| 7847916 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2010-12-07 |
| 7826031 | Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method | Hideaki Hara, Dai Arai | 2010-11-02 |
| 7486380 | Wafer table for immersion lithography | Andrew J. Hazelton | 2009-02-03 |
| 7301607 | Wafer table for immersion lithography | Andrew J. Hazelton | 2007-11-27 |