Issued Patents All Time
Showing 1–25 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10156792 | Projection optical system, exposure apparatus, and exposure method | — | 2018-12-18 |
| 10048602 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2018-08-14 |
| 9933705 | Reduction projection optical system, exposure apparatus, and exposure method | — | 2018-04-03 |
| 9891539 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2018-02-13 |
| 9846366 | Projection optical system, exposure apparatus, and exposure method | — | 2017-12-19 |
| 9606443 | Reducing immersion projection optical system | — | 2017-03-28 |
| 9500943 | Projection optical system, exposure apparatus, and exposure method | — | 2016-11-22 |
| 9429851 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-08-30 |
| 9360763 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-06-07 |
| 9316921 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2016-04-19 |
| 9310696 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2016-04-12 |
| 9086635 | Projection optical system, exposure apparatus, and exposure method | — | 2015-07-21 |
| 9081295 | Catadioptric projection optical system, exposure apparatus, and exposure method | — | 2015-07-14 |
| 8854601 | Projection optical system, exposure apparatus, and exposure method | Takaya Okada, Hiroyuki Nagasaka | 2014-10-07 |
| 8665418 | Projection optical system, exposure apparatus, and device manufacturing method | — | 2014-03-04 |
| 8605252 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2013-12-10 |
| 8436983 | Optical system, exposure system, and exposure method | — | 2013-05-07 |
| 8351021 | Optical system, exposure system, and exposure method | — | 2013-01-08 |
| 8339578 | Optical system, exposure system, and exposure method | — | 2012-12-25 |
| 8253924 | Exposure method, exposure apparatus and device manufacturing method | Yusaku Uehara, Kousuke Suzuki, Katsushi Nakano | 2012-08-28 |
| 8208119 | Exposure apparatus, exposure method, and method for producing device | Naoyuki Kobayashi, Soichi Owa, Shigeru Hirukawa | 2012-06-26 |
| 8102508 | Projection optical system, exposure apparatus, and exposure method | Soichi Owa | 2012-01-24 |
| 8009271 | Projection optical system, exposure apparatus, exposure system, and exposure method | — | 2011-08-30 |
| 7990609 | Catadioptric imaging system with prolate spheroidal-shaped mirrors | — | 2011-08-02 |
| 7978310 | Projection optical system, exposure system, and exposure method | Hironori Ikezawa, Yuji Kudo | 2011-07-12 |