Issued Patents All Time
Showing 51–75 of 85 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6788389 | Production method of projection optical system | Youhei Fujishima, Hironori Ikezawa, Toshihiko Ozawa, Takeshi Suzuki | 2004-09-07 |
| 6768537 | Projection optical system, exposure apparatus, and exposure method | Takeshi Suzuki, Hideki Komatsuda | 2004-07-27 |
| 6757051 | Projection optical system, manufacturing method thereof, and projection exposure apparatus | Tetsuo Takahashi, Jin Nishikawa | 2004-06-29 |
| 6750948 | PROJECTION OPTICAL SYSTEM, PROJECTION EXPOSURE APPARATUS HAVING THE PROJECTION OPTICAL SYSTEM, PROJECTION METHOD THEREOF, EXPOSURE METHOD THEREOF AND FABRICATING METHOD FOR FABRICATING A DEVICE USING THE PROJECTION EXPOSURE APPARATUS | — | 2004-06-15 |
| 6714280 | Projection optical system, projection exposure apparatus, and projection exposure method | — | 2004-03-30 |
| 6707601 | Exposure apparatus and method | Yutaka Suenaga | 2004-03-16 |
| 6674513 | Projection exposure methods and apparatus, and projection optical systems | — | 2004-01-06 |
| 6661499 | Projection exposure apparatus with a catadioptric projection optical system | Toshihiko Ozawa, Takashi Mori, Hideki Komatsuda | 2003-12-09 |
| 6646797 | Exposure apparatus and method | Yutaka Suenaga | 2003-11-11 |
| 6639732 | Projection exposure apparatus and method | Tetsuo Takahashi, Masatoshi Ikeda, Shiwen Li | 2003-10-28 |
| 6639734 | Catadioptric imaging system and a projection exposure apparatus provided with said imaging system | — | 2003-10-28 |
| 6606144 | Projection exposure methods and apparatus, and projection optical systems | — | 2003-08-12 |
| 6556353 | Projection optical system, projection exposure apparatus, and projection exposure method | — | 2003-04-29 |
| 6512641 | Projection exposure apparatus and method | — | 2003-01-28 |
| 6473243 | Catadioptric imaging system and a projection exposure apparatus provided with said imaging system | — | 2002-10-29 |
| 6466303 | Projection exposure apparatus with a catadioptric projection optical system | Toshihiko Ozawa, Takashi Mori, Hideki Komatsuda | 2002-10-15 |
| 6451507 | Exposure apparatus and method | Yutaka Suenaga | 2002-09-17 |
| 6452723 | Exposure apparatus and method | Yutaka Suenaga | 2002-09-17 |
| 6362926 | Projection exposure apparatus and method | Yutaka Ichihara, Tetsuo Takahashi | 2002-03-26 |
| 6208473 | Catadioptric projection lens | — | 2001-03-27 |
| 6195213 | Projection exposure apparatus and method | Tetsuo Takahashi, Masatoshi Ikeda, Shiwen Li, Yutaka Ichihara | 2001-02-27 |
| 6104542 | Wide-angle eyepiece lens with large eye relief | — | 2000-08-15 |
| 6081382 | Catadioptric reduction projection optical system | — | 2000-06-27 |
| 6069749 | Catadioptric reduction optical system | — | 2000-05-30 |
| 5969802 | Exposure apparatus | Tetsuo Takahashi, Shigeo Mizoroke | 1999-10-19 |