Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7978310 | Projection optical system, exposure system, and exposure method | Yuji Kudo, Yasuhiro Omura | 2011-07-12 |
| 7710653 | Projection optical system, exposure system, and exposure method | Yuji Kudo, Yasuhiro Omura | 2010-05-04 |
| 7701640 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura, David M. Williamson | 2010-04-20 |
| 7688422 | Projection optical system, exposure system, and exposure method | Yasuhiro Omura | 2010-03-30 |
| 7688517 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura | 2010-03-30 |
| 7619827 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura | 2009-11-17 |
| 7609455 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura | 2009-10-27 |
| 7580197 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura | 2009-08-25 |
| 7557997 | Immersion objective optical system, exposure apparatus, device fabrication method, and boundary optical element | Yasuhiro Omura | 2009-07-07 |
| 7551362 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura | 2009-06-23 |
| 7471374 | Projection optical system, exposure apparatus, and exposure method | Yasuhiro Omura, Kumiko Ishida | 2008-12-30 |
| 7362508 | Projection optical system and method for photolithography and exposure apparatus and method using same | Yasuhiro Omura, David M. Williamson | 2008-04-22 |
| 6788389 | Production method of projection optical system | Youhei Fujishima, Toshihiko Ozawa, Yasuhiro Omura, Takeshi Suzuki | 2004-09-07 |