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Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus |
— |
2013-11-05 |
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Illumination optical apparatus, exposure apparatus, and method for producing device |
— |
2010-05-18 |
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System for controlling a dual mover assembly for an exposure apparatus |
Yi-Ping Hsin, Hideyuki Hashimoto, Bausan Yuan, Douglas C. Watson |
2009-09-01 |
| 6791766 |
Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method |
— |
2004-09-14 |
| 6757051 |
Projection optical system, manufacturing method thereof, and projection exposure apparatus |
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2004-06-29 |