Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10759678 | Dilute chemical solution producing apparatus and dilute chemical solution producing method | Yu FUJIMURA, Nobuko GAN | 2020-09-01 |
| 10180211 | Supply method for liquid and supply apparatus | Kazuya Ishiwata | 2019-01-15 |
| 9302298 | Device for supplying water containing dissolved gas and process for producing water containing dissolved gas | Keita Seo | 2016-04-05 |
| 9129797 | Cleaning method | Hiroshi Morita | 2015-09-08 |
| 8999069 | Method for producing cleaning water for an electronic material | Junichi Ida | 2015-04-07 |
| 8783095 | Ultrapure water production facility and method of monitoring ultrapure water | Hideki Kobayashi | 2014-07-22 |
| 8771522 | Method and apparatus for treating organic matter-containing water | — | 2014-07-08 |
| 8721803 | Cleaning liquid, cleaning method, liquid generating apparatus, exposure apparatus, and device fabricating method | Hiroyuki Nagasaka, Hiroshi Morita | 2014-05-13 |
| 8123833 | Process for producing gas-containing cleaning water, apparatus for producing the cleaning water and cleaning apparatus | Hiroshi Morita | 2012-02-28 |