Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900880 | Exposure apparatus, surface position adjustment unit, mask, and device manufacturing method | Yoshiki Kida | 2005-05-31 |
| 5936711 | Projection exposure method and projection exposure apparatus | Yuji Imai | 1999-08-10 |
| 5825470 | Exposure apparatus | Yuji Imai | 1998-10-20 |
| 5581324 | Thermal distortion compensated projection exposure method and apparatus for manufacturing semiconductors | Yuji Imai, Tetsuo Taniguchi, Kousuke Suzuki | 1996-12-03 |