| 7221433 |
Stage assembly including a reaction assembly having a connector assembly |
— |
2007-05-22 |
| 6958808 |
System and method for resetting a reaction mass assembly of a stage assembly |
Keiichi Tanaka, Andrew J. Hazelton |
2005-10-25 |
| 6888620 |
System and method for holding a device with minimal deformation |
Martin E. Lee, Douglas C. Watson |
2005-05-03 |
| 6885430 |
System and method for resetting a reaction mass assembly of a stage assembly |
Keiichi Tanaka, Andrew J. Hazelton |
2005-04-26 |
| 6882126 |
Holder mover for a stage assembly |
Douglas C. Watson, Andrew J. Hazelton, Martin E. Lee |
2005-04-19 |
| 6842248 |
System and method for calibrating mirrors of a stage assembly |
Masahiko Okumura |
2005-01-11 |
| 6757053 |
Stage assembly including a reaction mass assembly |
Andrew J. Hazelton |
2004-06-29 |
| 6731372 |
Multiple chamber fluid mount |
Douglas C. Watson |
2004-05-04 |
| 6603531 |
Stage assembly including a reaction assembly that is connected by actuators |
— |
2003-08-05 |
| 6593997 |
Stage assembly including a reaction assembly |
Doug Watson, Andrew J. Hazelton |
2003-07-15 |
| 6408767 |
Low stiffness suspension for a stage |
Douglas C. Watson |
2002-06-25 |
| 6313550 |
Coil mounting and cooling system for an electric motor |
Andrew J. Hazelton |
2001-11-06 |
| 6304320 |
Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same |
Keiichi Tanaka, Andrew J. Hazelton |
2001-10-16 |