Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8040783 | Optical information recording and reproducing apparatus, and cartridge | Takeshi Endo, Hiroshi Hatano, Tetsuya Noda, Kazutaka Noguchi, Hiroyuki Matsuda | 2011-10-18 |
| 6272763 | Staging apparatus and method, and method for manufacturing the staging apparatus, and exposing apparatus using the staging apparatus | Atsushi Yamaguchi | 2001-08-14 |
| 6122036 | Projection exposure apparatus and method | Masahiko Okumura | 2000-09-19 |
| 5983513 | Staging apparatus and method, and method for manufacturing the staging apparatus, and exposing apparatus using the staging apparatus | Atsushi Yamaguchi | 1999-11-16 |
| 5832620 | Staging apparatus | Atsushi Yamaguchi | 1998-11-10 |
| 5561524 | Interferometric distance measuring apparatus utilizing an asymmetric/elliptic beam | Masafumi Sueyoshi | 1996-10-01 |
| 5502899 | Staging apparatus | Atsushi Yamaguchi | 1996-04-02 |