Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140099 | Engine | — | 2024-11-12 |
| 10156180 | Cooling structure for multi-cylinder engine | Mikimasa Kawaguchi, Tomohiro Koguchi | 2018-12-18 |
| 9803534 | Cooling structure of multi-cylinder engine | Yusuke Marutani, Tomohiro Koguchi, Haruki Misumi | 2017-10-31 |
| 9297293 | Cooling structure of internal combustion engine | Nobuyuki Ohta | 2016-03-29 |
| 8967127 | Intake apparatus for internal combustion engine | Masatatsu Enami, Osamu Watanabe, Akihiro Katsuura, Takayuki Namai | 2015-03-03 |
| 7023521 | Exposure apparatus, exposure method and process for producing device | — | 2006-04-04 |
| RE38176 | Scanning exposure method | Hidemi Kawai, Fuyuhiko Inoue | 2003-07-08 |
| 6455214 | Scanning exposure method detecting focus during relative movement between energy beam and substrate | Yuji Imai, Masayoshi Yamazaki, Osamu Furukawa | 2002-09-24 |
| 6396071 | Scanning exposure method and apparatus | Kenji Nishi | 2002-05-28 |
| RE37359 | Projection exposure method and apparatus capable of performing focus detection with high accuracy | Yuji Imai | 2001-09-11 |
| 6277533 | Scanning exposure method | Yuji Imai, Kazuaki Suzuki | 2001-08-21 |
| 6118515 | Scanning exposure method | Yuji Imai, Kazuaki Suzuki | 2000-09-12 |
| 6100515 | Scanning exposure method and apparatus in which a mask and a substrate are moved at different scan velocities and exposure parameters are varied | Kenji Nishi | 2000-08-08 |
| 5985495 | Methods for measuring image-formation characteristics of a projection-optical system | Masahiko Okumura | 1999-11-16 |
| 5635722 | Projection exposure method and apparatus capable of performing focus detection with high accuracy | Yuji Imai | 1997-06-03 |
| 5617182 | Scanning exposure method | Hidemi Kawai, Fuyuhiko Inoue | 1997-04-01 |
| 5591958 | Scanning exposure method and apparatus | Kenji Nishi | 1997-01-07 |
| 5510892 | Inclination detecting apparatus and method | Hideo Mizutani, Kesayoshi Amano, Yuji Imai | 1996-04-23 |
| 5502311 | Method of and apparatus for detecting plane position | Yuji Imai, Yasuaki Tanaka | 1996-03-26 |
| 5473166 | Inclination detecting apparatus having an intensity adjusting unit | Yuji Imai | 1995-12-05 |
| 5461237 | Surface-position setting apparatus | Yuji Imai, Yasuaki Tanaka | 1995-10-24 |