Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6040096 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Toru Kiuchi, Toshikazu Umatate | 2000-03-21 |
| 5894056 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Toru Kiuchi, Toshikazu Umatate | 1999-04-13 |
| 5510892 | Inclination detecting apparatus and method | Hideo Mizutani, Shinji Wakamoto, Yuji Imai | 1996-04-23 |
| 5361121 | Periphery exposing method and apparatus therefor | Ken Hattori, Masao Nakajima, Masayoshi Naito | 1994-11-01 |
| 5229811 | Apparatus for exposing peripheral portion of substrate | Ken Hattori, Masao Nakajima, Masayoshi Naito | 1993-07-20 |
| 5194743 | Device for positioning circular semiconductor wafers | Masaaki Aoyama, Naomasa Shiraishi, Ken Hattori, Atsushi Yamaguchi | 1993-03-16 |
| 4999669 | Levelling device in an exposure apparatus | Hideaki Sakamoto | 1991-03-12 |