Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6864955 | Stage apparatus, exposure apparatus and method for exposing substrate plate | Kenji Nishi | 2005-03-08 |
| 6590633 | Stage apparatus and method for producing circuit device utilizing the same | Kenji Nishi | 2003-07-08 |
| 6414743 | Exposure apparatus, exposure method using the same and method of manufacture of circuit device | Kenji Nishi | 2002-07-02 |
| 6040096 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Kesayoshi Amano, Toshikazu Umatate | 2000-03-21 |
| 5894056 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Kesayoshi Amano, Toshikazu Umatate | 1999-04-13 |
| 5392024 | Collision detection system | Kenji Ogata, Masakazu Chiba, Makoto Shiota | 1995-02-21 |
| 5338062 | Side collision sensor system for side airbag apparatus | Kenji Ogata, Masakazu Chiba, Toshiaki Matsuhashi, Masahiro Taguchi, Motonori Tominaga | 1994-08-16 |
| 5289231 | Apparatus for manufacturing disc medium | Nobutaka Magome, Hiromitsu Iwata, Junichi Morino | 1994-02-22 |