Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795953 | Pattern forming method and method for producing device | Soichi Owa, Tomoharu Fujiwara | 2014-08-05 |
| 6040096 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Toru Kiuchi, Kesayoshi Amano | 2000-03-21 |
| 5894056 | Mask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatus | Yukio Kakizaki, Toru Kiuchi, Kesayoshi Amano | 1999-04-13 |
| 5243377 | Lithography information control system | Tadashi Yamaguchi | 1993-09-07 |
| 4958082 | Position measuring apparatus | Susumu Makinouchi | 1990-09-18 |
| 4833621 | Method of and apparatus for aligning a substrate | — | 1989-05-23 |
| 4780617 | Method for successive alignment of chip patterns on a substrate | Hiroyuki Suzuki | 1988-10-25 |