Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6884670 | Dry etching with reduced damage to MOS device | Koichi Hashimoto, Daisuke Matsunaga | 2005-04-26 |
| 6713492 | N-acyloxylated cycloalkyl compounds, composition containing the same and methods of use therefor | Osamu Itoh, Heitaro Obara, Hidekatsu Yokoyama | 2004-03-30 |
| 6707528 | Exposure apparatus having independent chambers and methods of making the same | Hiroyasu Fujita | 2004-03-16 |
| 6697145 | Substrate processing apparatus for coating photoresist on a substrate and forming a predetermined pattern on a substrate by exposure | — | 2004-02-24 |
| 6559485 | Semiconductor device having a gate insulation film resistant to dielectric breakdown | — | 2003-05-06 |
| 6376388 | Dry etching with reduced damage to MOS device | Koichi Hashimoto, Daisuke Matsunaga | 2002-04-23 |
| 6044850 | Semiconductor device manufacturing method including ashing process | Soichiro Ozawa, Satoru Mihara, Kunihiko Nagase, Naoki Nishida | 2000-04-04 |
| 5837334 | Large sized quartz glass tube, large scale quartz glass preform, process for manufacturing the same and quartz glass optical fiber | Kiyoshi Yokokawa, Gerhart Vilsmeier | 1998-11-17 |
| 5785729 | Method for manufacturing large-sized quartz glass tube | Kiyoshi Yokokawa, Gerhart Vilsmeier | 1998-07-28 |
| 5780257 | Method and reagent for detecting peroxidase or hydrogen peroxide | Masanobu Shiga | 1998-07-14 |
| 5651827 | Single-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for same | Hiroyuki Miyazawa | 1997-07-29 |
| 5559582 | Exposure apparatus | Kenji Nishi | 1996-09-24 |
| 5452119 | Scanning optical system | Akira Morimoto | 1995-09-19 |
| 5324012 | Holding apparatus for holding an article such as a semiconductor wafer | Keiichi Kimura | 1994-06-28 |
| 5299050 | Scanning optical system | Akira Morimoto | 1994-03-29 |
| 5218461 | Scanning optical apparatus | Akira Morimoto | 1993-06-08 |
| 5194743 | Device for positioning circular semiconductor wafers | Naomasa Shiraishi, Ken Hattori, Atsushi Yamaguchi, Kesayoshi Amano | 1993-03-16 |
| 4956208 | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor | Akira Uchikawa, Atsushi Iwasaki, Toshio Fukuoka, Mitsuo Matsumura, Hiroshi Matsui +4 more | 1990-09-11 |
| 4935046 | Manufacture of a quartz glass vessel for the growth of single crystal semiconductor | Akira Uchikawa, Atsushi Iwasaki, Toshio Fukuoka, Mitsuo Matsumura, Hiroshi Matsui +4 more | 1990-06-19 |
| 4900939 | System for processing and conveying substrate | — | 1990-02-13 |
| 4696905 | Method for diagnosing cancer using ESR | Mitsuharu Itabashi, Mariko Miura, Masahiro Kohno | 1987-09-29 |
| 4650335 | Comparison type dimension measuring method and apparatus using a laser beam in a microscope system | Tokuhisa Ito, Goro Kitamura, Hidenori Horiuchi | 1987-03-17 |
| 4625103 | Automatic focusing device in microscope system | Goro Kitamura, Hidenori Horiuchi, Tokuhisa Ito | 1986-11-25 |