Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6136723 | Dry etching process and a fabrication process of a semiconductor device using such a dry etching process | — | 2000-10-24 |
| 6044850 | Semiconductor device manufacturing method including ashing process | Soichiro Ozawa, Satoru Mihara, Masaaki Aoyama, Naoki Nishida | 2000-04-04 |