Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6200710 | Methods for producing segmented reticles | — | 2001-03-13 |
| 6156464 | Scanning-type charged-particle beam exposure methods including scan-velocity error detection and correction | — | 2000-12-05 |
| 5912096 | Charged-particle-beam exposure method with temperature-compensated exposure to offset expansion and contraction of substrate | — | 1999-06-15 |
| 4589139 | Apparatus for detecting defects in pattern | Norio Fujii, Toru Azuma, Kaoru Kikuchi, Junji Hazama | 1986-05-13 |
| 4506382 | Apparatus for detecting two-dimensional pattern and method for transforming the pattern into binary image | Norio Fujii, Atsushi Kawahara, Toru Azuma, Junji Hazama | 1985-03-19 |
| 4479145 | Apparatus for detecting the defect of pattern | Toru Azuma, Junji Hazama, Atsushi Kawahara, Norio Fujii | 1984-10-23 |
| 4472738 | Pattern testing apparatus | Norio Fujii, Atsushi Kawahara, Toru Azuma, Junji Hazama | 1984-09-18 |