Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8349525 | Protective apparatus, mask, mask fabricating method and conveying apparatus, and exposure apparatus | Akinori Shirato | 2013-01-08 |
| 8202671 | Protective apparatus, mask, mask forming apparatus, mask forming method, exposure apparatus, device fabricating method, and foreign matter detecting apparatus | — | 2012-06-19 |
| 6356341 | Exposure device, beam shape setting device and illuminating area setting device | Masaichi Murakami, Norimi Takemura | 2002-03-12 |
| 6325516 | Exposure apparatus and field stop thereof | Tomoyuki Watanabe, Masamitsu Yanagihara, Hideji Goto | 2001-12-04 |
| 6213607 | Exposure apparatus and field stop thereof | Tomoyuki Watanabe, Masamitsu Yanagihara, Hideji Goto | 2001-04-10 |