Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8139199 | Exposure method, exposure apparatus, light converging pattern formation member, mask, and device manufacturing method | — | 2012-03-20 |
| 7884921 | Illumination optical apparatus, projection exposure apparatus, projection optical system, and device manufacturing method | Naomasa Shiraishi | 2011-02-08 |