Issued Patents All Time
Showing 51–75 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6310679 | Projection exposure method and apparatus | — | 2001-10-30 |
| 6304317 | Projection apparatus and method | Tetsuo Taniguchi | 2001-10-16 |
| 6284416 | Photo mask and exposure method using same | Nobutaka Magome, Shigeru Hirukawa | 2001-09-04 |
| 6285455 | Mark detection method, optical system and mark position detector | — | 2001-09-04 |
| 6252647 | Projection exposure apparatus | — | 2001-06-26 |
| 6249335 | Photo-mask and method of exposing and projection-exposing apparatus | Shigeru Hirukawa, Masaomi Kameyama | 2001-06-19 |
| 6242754 | Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus | — | 2001-06-05 |
| 6243158 | Projection exposure apparatus and method | — | 2001-06-05 |
| 6233041 | Exposure method utilizing diffracted light having different orders of diffraction | — | 2001-05-15 |
| 6211944 | Projection exposure method and apparatus | — | 2001-04-03 |
| 6132908 | Photo mask and exposure method using the same | Nobutaka Magome, Shigeru Hirukawa | 2000-10-17 |
| 6118516 | Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns | Nobuyuki Irie, Nobutaka Magome, Yasuaki Tanaka, Shigeru Hirukawa | 2000-09-12 |
| 6108089 | Position detecting apparatus and method for projection exposure apparatus | — | 2000-08-22 |
| 6100961 | Projection exposure apparatus and method | Yuji Kudo | 2000-08-08 |
| 6101267 | Position detecting method and apparatus, and exposure method and apparatus | — | 2000-08-08 |
| 6094305 | Exposure method and apparatus therefor | — | 2000-07-25 |
| 6078380 | Projection exposure apparatus and method involving variation and correction of light intensity distributions, detection and control of imaging characteristics, and control of exposure | Tetsuo Taniguchi, Nobutaka Magome | 2000-06-20 |
| 6034378 | Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus | — | 2000-03-07 |
| 6023321 | Projection exposure apparatus and method | — | 2000-02-08 |
| 6020950 | Exposure method and projection exposure apparatus | — | 2000-02-01 |
| 5991009 | Illumination optical apparatus using different number of light sources under different exposure modes, method of operating and method of manufacturing thereof | Kenji Nishi | 1999-11-23 |
| 5982489 | Method and apparatus for measuring depth of a depression in a pattern by light interference from crossed light beams | — | 1999-11-09 |
| 5966201 | Mark for position detection, and mark detecting method and apparatus | Nobutaka Magome | 1999-10-12 |
| 5903356 | Position detecting apparatus | — | 1999-05-11 |
| 5861320 | Position detection mark and position detection method | — | 1999-01-19 |