Issued Patents All Time
Showing 101–107 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5357311 | Projection type light exposure apparatus and light exposure method | — | 1994-10-18 |
| 5343270 | Projection exposure apparatus | Yasuyuki Sakakibara, Susumu Makinouchi, Nobutaka Magome | 1994-08-30 |
| 5335044 | Projection type exposure apparatus and method of exposure | — | 1994-08-02 |
| 5333035 | Exposing method | — | 1994-07-26 |
| 5272501 | Projection exposure apparatus | Kenji Nishi, Saburo Kamiya | 1993-12-21 |
| 5194743 | Device for positioning circular semiconductor wafers | Masaaki Aoyama, Ken Hattori, Atsushi Yamaguchi, Kesayoshi Amano | 1993-03-16 |
| 5117255 | Projection exposure apparatus | Tetsuo Taniguchi, Hidemi Kawai | 1992-05-26 |