Issued Patents All Time
Showing 76–100 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5815248 | Illumination optical apparatus and method having a wavefront splitter and an optical integrator | Kenji Nishi | 1998-09-29 |
| 5815249 | Illumination optical apparatus and method having a wavefront splitter and an optical integrator | Kenji Nishi | 1998-09-29 |
| 5801390 | Position-detection method and apparatus with a grating mark | — | 1998-09-01 |
| 5801816 | Projection exposure apparatus | — | 1998-09-01 |
| 5774240 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Nobutaka Magome, Toshio Matsuura +2 more | 1998-06-30 |
| 5719704 | Projection exposure apparatus | Yuji Kudo, Saburo Kamiya | 1998-02-17 |
| 5715089 | Exposure method and apparatus therefor | — | 1998-02-03 |
| 5706091 | Apparatus for detecting a mark pattern on a substrate | — | 1998-01-06 |
| 5703675 | Projection-exposing apparatus with deflecting grating member | Shigeru Hirukawa, Masaomi Kameyama | 1997-12-30 |
| 5677757 | Projection exposure apparatus | Tetsuo Taniguchi | 1997-10-14 |
| 5638211 | Method and apparatus for increasing the resolution power of projection lithography exposure system | — | 1997-06-10 |
| 5621500 | Method and apparatus for projection exposure | — | 1997-04-15 |
| 5610684 | Projection exposure apparatus | — | 1997-03-11 |
| 5576829 | Method and apparatus for inspecting a phase-shifted mask | Nobutaka Magome | 1996-11-19 |
| 5552856 | Projection exposure apparatus | Shigeru Hirukawa | 1996-09-03 |
| 5546225 | High resolution printing technique by using improved mask pattern and improved illumination system | — | 1996-08-13 |
| 5528390 | Exposure apparatus for reproducing a mask pattern onto a photo-sensitive surface of a substrate using holographic techniques | Akihiro Goto, Takashi Genma, Yutaka Ichihara, Nobutaka Magome, Toshio Matsuura +2 more | 1996-06-18 |
| 5504596 | Exposure method and apparatus using holographic techniques | Akihiro Goto, Takashi Gemma, Yutaka Ichihara, Nobutaka Magome, Hiroshi Shirasu +1 more | 1996-04-02 |
| 5499137 | Exposure method and apparatus therefor | — | 1996-03-12 |
| 5483311 | Projection exposure apparatus | Yasuyuki Sakakibara, Susumu Makinouchi, Nobutaka Magome | 1996-01-09 |
| 5481332 | Projection exposure method and apparatus for improved image transfer from photomask having periodic and non-periodic patterns | — | 1996-01-02 |
| 5467166 | Projection exposure method and apparatus | — | 1995-11-14 |
| 5448336 | Apparatus and method for projection exposure | — | 1995-09-05 |
| 5420417 | Projection exposure apparatus with light distribution adjustment | — | 1995-05-30 |
| 5379090 | Projection exposure apparatus | — | 1995-01-03 |