Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817242 | Exposure method and device manufacturing method, exposure apparatus, and program | Masaharu Kawakubo, Chiaki Nakagawa, Takahisa Kikuchi, Masahiko Akizuki | 2010-10-19 |