Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817242 | Exposure method and device manufacturing method, exposure apparatus, and program | Masaharu Kawakubo, Yuho Kanaya, Chiaki Nakagawa, Takahisa Kikuchi | 2010-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817242 | Exposure method and device manufacturing method, exposure apparatus, and program | Masaharu Kawakubo, Yuho Kanaya, Chiaki Nakagawa, Takahisa Kikuchi | 2010-10-19 |