Issued Patents All Time
Showing 176–200 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8553204 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2013-10-08 |
| 8547528 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2013-10-01 |
| 8514395 | Exposure method, exposure apparatus, and device manufacturing method | — | 2013-08-20 |
| 8514373 | Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method | — | 2013-08-20 |
| 8508735 | Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method | — | 2013-08-13 |
| 8493547 | Exposure apparatus, exposure method, and device manufacturing method | — | 2013-07-23 |
| 8488109 | Exposure method, exposure apparatus, and device manufacturing method | — | 2013-07-16 |
| 8488106 | Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method | Akira Okutomi, Kazuhiro Hirano | 2013-07-16 |
| 8451425 | Exposure apparatus, exposure method, cleaning apparatus, and device manufacturing method | — | 2013-05-28 |
| 8435723 | Pattern forming method and device production method | Shigeru Hirukawa | 2013-05-07 |
| 8432534 | Holding apparatus, position detection apparatus and exposure apparatus, moving method, position detection method, exposure method, adjustment method of detection system and device manufacturing method | — | 2013-04-30 |
| 8421994 | Exposure apparatus | — | 2013-04-16 |
| 8411271 | Pattern forming method, pattern forming apparatus, and device manufacturing method | — | 2013-04-02 |
| 8400614 | Pattern formation method and pattern formation apparatus, exposure method and exposure apparatus, and device manufacturing method | — | 2013-03-19 |
| 8358401 | Stage apparatus, exposure apparatus and device manufacturing method | Hiromitsu Yoshimoto | 2013-01-22 |
| 8330939 | Immersion exposure apparatus and device manufacturing method with a liquid recovery port provided on at least one of a first stage and second stage | Tomoharu Fujiwara | 2012-12-11 |
| 8325325 | Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method | — | 2012-12-04 |
| 8325326 | Stage unit, exposure apparatus, and exposure method | — | 2012-12-04 |
| 8279399 | Exposure apparatus, exposure method, and device manufacturing method | — | 2012-10-02 |
| 8274639 | Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method | — | 2012-09-25 |
| 8269945 | Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method | — | 2012-09-18 |
| 8264669 | Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head | — | 2012-09-11 |
| 8253929 | Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing method | — | 2012-08-28 |
| 8237919 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads | Yuho Kanaya | 2012-08-07 |
| 8237916 | Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method | — | 2012-08-07 |