Issued Patents All Time
Showing 226–230 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7489389 | Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane | — | 2009-02-10 |
| 7420752 | Holding apparatus | — | 2008-09-02 |
| 7394526 | Stage apparatus, fixation method, exposure apparatus, exposure method, and device-producing method | — | 2008-07-01 |
| 7154684 | Optical element holding apparatus | — | 2006-12-26 |
| 6930842 | Optical element holding device for exposure apparatus | — | 2005-08-16 |