Issued Patents All Time
Showing 201–225 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8228484 | Coupling apparatus, exposure apparatus, and device fabricating method | Kazuya Ono | 2012-07-24 |
| 8218129 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement system | Yuho Kanaya | 2012-07-10 |
| 8203697 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | — | 2012-06-19 |
| 8194232 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method | Yuho Kanaya | 2012-06-05 |
| 8164736 | Exposure method, exposure apparatus, and method for producing device | — | 2012-04-24 |
| 8134688 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2012-03-13 |
| 8120751 | Coupling apparatus, exposure apparatus, and device fabricating method | Kazuya Ono | 2012-02-21 |
| 8115906 | Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method | — | 2012-02-14 |
| 8089615 | Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating method | Takeyuki Mizutani, Makoto Shibuta | 2012-01-03 |
| 8070145 | Holding unit, assembly system, sputtering unit, and processing method and processing unit | — | 2011-12-06 |
| 8054472 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2011-11-08 |
| 8045136 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2011-10-25 |
| 8027021 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2011-09-27 |
| 8023103 | Exposure apparatus, exposure method, and method for producing device | Hideki Komatsuda | 2011-09-20 |
| 8023106 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuho Kanaya | 2011-09-20 |
| 8013982 | Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method | — | 2011-09-06 |
| 7999918 | Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method | — | 2011-08-16 |
| 7927428 | Cleaning member, cleaning method, and device manufacturing method | — | 2011-04-19 |
| 7852034 | Drive method of moving body, stage unit, and exposure apparatus | — | 2010-12-14 |
| 7839485 | Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method | — | 2010-11-23 |
| 7764447 | Optical element holding device, lens barrel, exposing device, and device producing method | — | 2010-07-27 |
| 7697222 | Apparatus for holding optical element, barrel, exposure apparatus, and device producing method | — | 2010-04-13 |
| 7619715 | Coupling apparatus, exposure apparatus, and device fabricating method | Kazuya Ono | 2009-11-17 |
| 7589822 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2009-09-15 |
| 7589823 | Stage device, exposure apparatus, and method of manufacturing device | — | 2009-09-15 |