Issued Patents All Time
Showing 151–175 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8860925 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | — | 2014-10-14 |
| 8854632 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2014-10-07 |
| 8842278 | Exposure method, exposure apparatus, and device manufacturing method | — | 2014-09-23 |
| 8797508 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-08-05 |
| 8792079 | Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body | — | 2014-07-29 |
| 8792084 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-07-29 |
| 8773635 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-07-08 |
| 8767182 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method | Yuho Kanaya | 2014-07-01 |
| 8760629 | Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body | — | 2014-06-24 |
| 8735051 | Exposure method and exposure apparatus, and device manufacturing method | — | 2014-05-27 |
| 8736808 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2014-05-27 |
| 8724079 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2014-05-13 |
| 8717543 | Substrate holder, stage apparatus, and exposure apparatus with first support part provided in a suction space and second support part | — | 2014-05-06 |
| 8711328 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2014-04-29 |
| 8711327 | Exposure apparatus, exposure method, and device manufacturing method | — | 2014-04-29 |
| 8705008 | Substrate holding unit, exposure apparatus having same, exposure method, method for producing device, and liquid repellant plate | — | 2014-04-22 |
| 8705002 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2014-04-22 |
| 8693006 | Reflector, optical element, interferometer system, stage device, exposure apparatus, and device fabricating method | — | 2014-04-08 |
| 8675171 | Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method | — | 2014-03-18 |
| 8668191 | Holding unit, assembly system, sputtering unit, and processing method and processing unit | — | 2014-03-11 |
| 8609301 | Mask, exposure apparatus and device manufacturing method | — | 2013-12-17 |
| 8599359 | Exposure apparatus, exposure method, device manufacturing method, and carrier method | — | 2013-12-03 |
| 8593632 | Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method | — | 2013-11-26 |
| 8582084 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method | Yuho Kanaya | 2013-11-12 |
| 8553203 | Stage drive method and stage unit, exposure apparatus, and device manufacturing method | — | 2013-10-08 |