Issued Patents All Time
Showing 101–125 of 230 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678433 | Exposure apparatus and exposure method, and device manufacturing method | — | 2017-06-13 |
| 9665016 | Lithographic apparatus and method having substrate table and sensor table to hold immersion liquid | — | 2017-05-30 |
| 9632431 | Lithographic apparatus and method having substrate and sensor tables | — | 2017-04-25 |
| 9625834 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2017-04-18 |
| 9612539 | Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head | — | 2017-04-04 |
| 9594313 | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method | — | 2017-03-14 |
| 9588443 | Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method | — | 2017-03-07 |
| 9575417 | Exposure apparatus including a mask holding device which holds a periphery area of a pattern area of the mask from above | — | 2017-02-21 |
| 9568844 | Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method | — | 2017-02-14 |
| 9563116 | Mask, exposure apparatus and device manufacturing method | — | 2017-02-07 |
| 9557656 | Stage apparatus and exposure apparatus | — | 2017-01-31 |
| 9535339 | Exposure apparatus, exposure method, and device manufacturing method | — | 2017-01-03 |
| 9507267 | Exposure apparatus, exposure method, and device manufacturing method | — | 2016-11-29 |
| 9477155 | Exposure method, exposure apparatus, and device manufacturing method | — | 2016-10-25 |
| 9442396 | Exposure apparatus, exposure method, device manufacturing method, and carrier method | — | 2016-09-13 |
| 9429854 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2016-08-30 |
| 9423702 | Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer | — | 2016-08-23 |
| 9423703 | Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads | — | 2016-08-23 |
| 9423705 | Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method | — | 2016-08-23 |
| 9389517 | Exposure apparatus, exposure method, and device manufacturing method | — | 2016-07-12 |
| 9377698 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method | — | 2016-06-28 |
| 9372414 | Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads | — | 2016-06-21 |
| 9360772 | Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method | — | 2016-06-07 |
| 9329060 | Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method | — | 2016-05-03 |
| 9323160 | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium | — | 2016-04-26 |