Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11223303 | Motor with force constant modeling and identification for flexible mode control | Pai-Hsueh Yang, Tsutomu Ogiwara, Bausan Yuan | 2022-01-11 |
| 10261419 | Magnet array for moving magnet planar motor | Pai-Hsueh Yang, Takakuni Goto | 2019-04-16 |
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Bausan Yuan, Shiang-Lung Koo | 2016-10-11 |
| 9013134 | Method for determing a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Bausan Yuan, Shiang-Lung Koo | 2015-04-21 |
| 8488106 | Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method | Yuichi Shibazaki, Akira Okutomi | 2013-07-16 |
| 8341999 | Terminal and method for producing the same | — | 2013-01-01 |
| 8140288 | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage | Pai-Hsueh Yang, Bausan Yuan, Kazuo Masaki, Xiao-Feng Yang, Scott Coakley +1 more | 2012-03-20 |
| 7366642 | Minimum force output control method for counter-mass with cable | Yi-Ping Hsin, Gabor Szoboszlay, Kazuo Masaki, Christopher Blake Smith, Ryoichi Kawaguchi +1 more | 2008-04-29 |
| 7253576 | E/I core actuator commutation formula and control method | Pai-Hsueh Yang, Ping-Wei Chang, Tim Teng, Bausan Yuan | 2007-08-07 |
| 7034474 | Auto-calibration of attraction-only type actuator commutations | Pai-Hsueh Yang, Tim Teng, Bausan Yuan | 2006-04-25 |
| 5329336 | Exposure method and apparatus | Masahiro Nei | 1994-07-12 |