| 11223303 |
Motor with force constant modeling and identification for flexible mode control |
Tsutomu Ogiwara, Kazuhiro Hirano, Bausan Yuan |
2022-01-11 |
| 11092170 |
Dual valve fluid actuator assembly |
Alex Ka Tim Poon, Yeong-Jun Choi, Sandy Lee, Gaurav Keswani, Rocky Mai |
2021-08-17 |
| 10261419 |
Magnet array for moving magnet planar motor |
Takakuni Goto, Kazuhiro Hirano |
2019-04-16 |
| 9921495 |
Magnetic sensor calibration and servo for planar motor stage |
Michael Binnard, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara |
2018-03-20 |
| 9529353 |
Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same |
Michael Binnard, Scott Coakley |
2016-12-27 |
| 9465305 |
Method for determining a commutation offset and for determining a compensation map for a stage |
Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo |
2016-10-11 |
| 9243969 |
Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece |
— |
2016-01-26 |
| 9030057 |
Method and apparatus to allow a plurality of stages to operate in close proximity |
Michael B. Binnad |
2015-05-12 |
| 9013134 |
Method for determing a commutation offset and for determining a compensation map for a stage |
Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo |
2015-04-21 |
| 8853988 |
Control systems and methods for compensating for effects of a stage motor |
Michael Binnard, Scott Coakley, Douglas C. Watson |
2014-10-07 |
| 8582080 |
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage |
Michael Binnard, Wen-Hou Ma, Toshio Ueta, Ting-Chien Teng, Bausan Yuan |
2013-11-12 |
| 8451431 |
Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like |
Shiang-Lung Koo |
2013-05-28 |
| 8140288 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage |
Bausan Yuan, Kazuo Masaki, Kazuhiro Hirano, Xiao-Feng Yang, Scott Coakley +1 more |
2012-03-20 |
| 7989756 |
Active-isolation mounts for optical elements |
Shiang-Lung Koo, Yi-Ping Hsin, Hideyuki Hashimoto, Bausan Yuan |
2011-08-02 |
| 7417714 |
Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage |
Michael Binnard, Wen-Hou Ma, Toshio Ueta, Ting-Chien Teng, Bausan Yuan |
2008-08-26 |
| 7253576 |
E/I core actuator commutation formula and control method |
Kazuhiro Hirano, Ping-Wei Chang, Tim Teng, Bausan Yuan |
2007-08-07 |
| 7172493 |
Fine force actuator assembly for chemical mechanical polishing apparatuses |
W. Thomas Novak, Douglas C. Watson, Bausan Yuan |
2007-02-06 |
| 7034474 |
Auto-calibration of attraction-only type actuator commutations |
Tim Teng, Kazuhiro Hirano, Bausan Yuan |
2006-04-25 |
| 6917412 |
Modular stage with reaction force cancellation |
Alex Ka Tim Poon, Leonard Wai Fung Kho, Ping-Wei Chang |
2005-07-12 |
| 6855032 |
Fine force control of actuators for chemical mechanical polishing apparatuses |
Bausan Yuan |
2005-02-15 |