Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11223303 | Motor with force constant modeling and identification for flexible mode control | Tsutomu Ogiwara, Kazuhiro Hirano, Bausan Yuan | 2022-01-11 |
| 11092170 | Dual valve fluid actuator assembly | Alex Ka Tim Poon, Yeong-Jun Choi, Sandy Lee, Gaurav Keswani, Rocky Mai | 2021-08-17 |
| 10261419 | Magnet array for moving magnet planar motor | Takakuni Goto, Kazuhiro Hirano | 2019-04-16 |
| 9921495 | Magnetic sensor calibration and servo for planar motor stage | Michael Binnard, J. Kyle Wells, Chetan Mahadeswaraswamy, Tsutomu Ogiwara | 2018-03-20 |
| 9529353 | Methods for limiting counter-mass trim-motor force and stage assemblies incorporating same | Michael Binnard, Scott Coakley | 2016-12-27 |
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo | 2016-10-11 |
| 9243969 | Method for calibrating a force constant of a motorized stage used for supporting and moving a workpiece | — | 2016-01-26 |
| 9030057 | Method and apparatus to allow a plurality of stages to operate in close proximity | Michael B. Binnad | 2015-05-12 |
| 9013134 | Method for determing a commutation offset and for determining a compensation map for a stage | Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan, Shiang-Lung Koo | 2015-04-21 |
| 8853988 | Control systems and methods for compensating for effects of a stage motor | Michael Binnard, Scott Coakley, Douglas C. Watson | 2014-10-07 |
| 8582080 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Toshio Ueta, Ting-Chien Teng, Bausan Yuan | 2013-11-12 |
| 8451431 | Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like | Shiang-Lung Koo | 2013-05-28 |
| 8140288 | On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage | Bausan Yuan, Kazuo Masaki, Kazuhiro Hirano, Xiao-Feng Yang, Scott Coakley +1 more | 2012-03-20 |
| 7989756 | Active-isolation mounts for optical elements | Shiang-Lung Koo, Yi-Ping Hsin, Hideyuki Hashimoto, Bausan Yuan | 2011-08-02 |
| 7417714 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Toshio Ueta, Ting-Chien Teng, Bausan Yuan | 2008-08-26 |
| 7253576 | E/I core actuator commutation formula and control method | Kazuhiro Hirano, Ping-Wei Chang, Tim Teng, Bausan Yuan | 2007-08-07 |
| 7172493 | Fine force actuator assembly for chemical mechanical polishing apparatuses | W. Thomas Novak, Douglas C. Watson, Bausan Yuan | 2007-02-06 |
| 7034474 | Auto-calibration of attraction-only type actuator commutations | Tim Teng, Kazuhiro Hirano, Bausan Yuan | 2006-04-25 |
| 6917412 | Modular stage with reaction force cancellation | Alex Ka Tim Poon, Leonard Wai Fung Kho, Ping-Wei Chang | 2005-07-12 |
| 6855032 | Fine force control of actuators for chemical mechanical polishing apparatuses | Bausan Yuan | 2005-02-15 |