Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394608 | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system | Krishna Birru, Gang Liu, Anand Chandrashekar, Gishun Hsu | 2025-08-19 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2024-12-10 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2022-06-21 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2020-09-01 |
| 10203610 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2019-02-12 |
| 9817319 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2017-11-14 |
| 9547243 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2017-01-17 |
| 9329492 | Apparatus and method to control vacuum at porous material using multiple porous materials | Alex Ka Tim Poon, Derek Coon | 2016-05-03 |
| 9285683 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2016-03-15 |
| 9217933 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon, Daishi Tanaka | 2015-12-22 |
| 9176394 | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate | Alex Ka Tim Poon, Derek Coon, Gaurav Keswani, Daishi Tanaka | 2015-11-03 |
| 8934080 | Apparatus and methods for recovering fluid in immersion lithography | Alex Ka Tim Poon, Derek Coon, Gaurav Keswani | 2015-01-13 |
| 8896807 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2014-11-25 |
| 8780323 | Apparatus and method for recovering liquid droplets in immersion lithography | Alex Ka Tim Poon, Gaurav Keswani | 2014-07-15 |
| 8743343 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon, Daishi Tanaka | 2014-06-03 |
| 8634055 | Apparatus and method to control vacuum at porous material using multiple porous materials | Alex Ka Tim Poon, Derek Coon, Gaurav Keswani | 2014-01-21 |
| 8610873 | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate | Alex Ka Tim Poon, Derek Coon, Gaurav Keswani, Daishi Tanaka | 2013-12-17 |
| 8520187 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2013-08-27 |
| 8477284 | Apparatus and method to control vacuum at porous material using multiple porous materials | Alex Ka Tim Poon, Derek Coon | 2013-07-02 |
| 8400610 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon, Daishi Tanak | 2013-03-19 |
| 8289497 | Apparatus and methods for recovering fluid in immersion lithography | Alex Ka Tim Poon, Derek Coon, Gaurav Keswani | 2012-10-16 |
| 8237911 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon | 2012-08-07 |
| 8068209 | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool | Alex Ka Tim Poon, Guarav Keswani, Derek Coon | 2011-11-29 |
| 8054448 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2011-11-08 |