Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8400610 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Derek Coon | 2013-03-19 |