Derek Coon — 23 Patents at Nikon

Derek Coon has been granted 23 US patents while listed as an inventor at Nikon. The first was granted in 2005 and the most recent in April 2017. Derek Coon ranks #178,160 of 4,157,543 US inventors in our database (top 4.3%). Patent records list Derek Coon in Redwood City, CA, US.

Issued Patents All Time

Showing 1–23 of 23 patents

Patent #	Title	Co-Inventors	Date
9618852	Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outlets	Andrew J. Hazelton	2017-04-11
9329492	Apparatus and method to control vacuum at porous material using multiple porous materials	Alex Ka Tim Poon, Leonard Wai Fung Kho	2016-05-03
9217933	Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Daishi Tanaka	2015-12-22
9176394	Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Daishi Tanaka	2015-11-03
8934080	Apparatus and methods for recovering fluid in immersion lithography	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2015-01-13
8797500	Immersion lithography fluid control system changing flow velocity of gas outlets based on motion of a surface	Andrew J. Hazelton	2014-08-05
8743343	Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Daishi Tanaka	2014-06-03
8634055	Apparatus and method to control vacuum at porous material using multiple porous materials	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2014-01-21
8610873	Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Daishi Tanaka	2013-12-17
8497973	Immersion lithography fluid control system regulating gas velocity based on contact angle	Andrew J. Hazelton	2013-07-30
8477284	Apparatus and method to control vacuum at porous material using multiple porous materials	Alex Ka Tim Poon, Leonard Wai Fung Kho	2013-07-02
8400610	Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Daishi Tanak	2013-03-19
8289497	Apparatus and methods for recovering fluid in immersion lithography	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2012-10-16
8237911	Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2012-08-07
8102501	Immersion lithography fluid control system using an electric or magnetic field generator	Andrew J. Hazelton	2012-01-24
8068209	Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool	Alex Ka Tim Poon, Leonard Wai Fung Kho, Guarav Keswani	2011-11-29
7903233	Offset partial ring seal in immersion lithographic system	—	2011-03-08
7745079	Apparatus for and method of thermophoretic protection of an object in a high-vacuum environment	—	2010-06-29
7591561	Liquid cooled mirror for use in extreme ultraviolet lithography	Alton H. Phillips, Douglas C. Watson	2009-09-22
7576833	Gas curtain type immersion lithography tool using porous material for fluid removal	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2009-08-18
7532309	Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid	Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani	2009-05-12
7339650	Immersion lithography fluid control system that applies force to confine the immersion liquid	Andrew J. Hazelton	2008-03-04
6847431	Method and device for controlling fluid flow in an optical assembly	Bernard Fay	2005-01-25

Derek Coon — 23 Patents

Issued Patents All Time

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