| 12307639 |
Image processing method, image processing device, and program |
Yasushi TANABE, Mariko HIROKAWA, Makoto Ishida |
2025-05-20 |
| 12067655 |
Image processing method, image processing device and program memory medium |
Yasushi TANABE, Makoto Ishida, Mariko MUKAI |
2024-08-20 |
| 10295454 |
Microparticle detection system and microparticle detection program |
Takanori Ichiki, Kuno SUZUKI |
2019-05-21 |
| 10113948 |
Particle detection method, particle detection device and particle detection system |
Takanori Ichiki, Kuno SUZUKI, Jiro Inoue, Kazuya Ota |
2018-10-30 |
| 10018552 |
Particle analysis apparatus, observation apparatus, particle analysis program and particle analysis method |
Hisao Osawa, Kuno SUZUKI |
2018-07-10 |
| 9217933 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Derek Coon |
2015-12-22 |
| 9176394 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate |
Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Gaurav Keswani |
2015-11-03 |
| 8743343 |
Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
Alex Ka Tim Poon, Leonard Wai Fung Kho, Gaurav Keswani, Derek Coon |
2014-06-03 |
| 8610873 |
Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate |
Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Gaurav Keswani |
2013-12-17 |
| 7438121 |
Heat exchanger and method for manufacturing the same |
Kazuhiko Minami, Shintaro Nakagawa |
2008-10-21 |
| 5947365 |
Process for producing flat heat exchange tubes |
Masakazu Furuta, Kazuyuki Takahashi, Yasuhiro Osame |
1999-09-07 |