Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092170 | Dual valve fluid actuator assembly | Alex Ka Tim Poon, Yeong-Jun Choi, Pai-Hsueh Yang, Sandy Lee, Rocky Mai | 2021-08-17 |
| 9217933 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Daishi Tanaka | 2015-12-22 |
| 9176394 | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Daishi Tanaka | 2015-11-03 |
| 8934080 | Apparatus and methods for recovering fluid in immersion lithography | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2015-01-13 |
| 8780323 | Apparatus and method for recovering liquid droplets in immersion lithography | Alex Ka Tim Poon, Leonard Wai Fung Kho | 2014-07-15 |
| 8743343 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Daishi Tanaka | 2014-06-03 |
| 8634055 | Apparatus and method to control vacuum at porous material using multiple porous materials | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2014-01-21 |
| 8610873 | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Daishi Tanaka | 2013-12-17 |
| 8400610 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon, Daishi Tanak | 2013-03-19 |
| 8289497 | Apparatus and methods for recovering fluid in immersion lithography | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2012-10-16 |
| 8237911 | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2012-08-07 |
| 7929109 | Apparatus and method for recovering liquid droplets in immersion lithography | Alex Ka Tim Poon, Leonard Wai Fung Kho | 2011-04-19 |
| 7751026 | Apparatus and method for recovering fluid for immersion lithography | Alex Ka Tim Poon, Leonard Wai Fung Kho | 2010-07-06 |
| 7576833 | Gas curtain type immersion lithography tool using porous material for fluid removal | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2009-08-18 |
| 7532309 | Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid | Alex Ka Tim Poon, Leonard Wai Fung Kho, Derek Coon | 2009-05-12 |