Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929109 | Apparatus and method for recovering liquid droplets in immersion lithography | Alex Ka Tim Poon, Gaurav Keswani | 2011-04-19 |
| 7751026 | Apparatus and method for recovering fluid for immersion lithography | Alex Ka Tim Poon, Gaurav Keswani | 2010-07-06 |
| 7576833 | Gas curtain type immersion lithography tool using porous material for fluid removal | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon | 2009-08-18 |
| 7532309 | Immersion lithography system and method having an immersion fluid containment plate for submerging the substrate to be imaged in immersion fluid | Alex Ka Tim Poon, Gaurav Keswani, Derek Coon | 2009-05-12 |
| 7375800 | Non-contact pneumatic transfer for stages with small motion | Alex Ka Tim Poon | 2008-05-20 |
| 7292313 | Apparatus and method for providing fluid for immersion lithography | Alex Ka Tim Poon | 2007-11-06 |
| 7283200 | System and method for measuring displacement of a stage | Alex Ka Tim Poon, Toru Kawaguchi, Hisashi Tazawa, Saburo Kamiya, Yasuhiro Hidaka | 2007-10-16 |
| 6917412 | Modular stage with reaction force cancellation | Alex Ka Tim Poon, Pai-Hsueh Yang, Ping-Wei Chang | 2005-07-12 |