Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765233 | Method for forming low-carbon CVD film for filling trenches | Atsuki Fukazawa, Shigeyuki Onizawa | 2014-07-01 |
| 7825040 | Method for depositing flowable material using alkoxysilane or aminosilane precursor | Atsuki Fukazawa, Jeongseok Ha, Shintaro Ueda | 2010-11-02 |
| 7283200 | System and method for measuring displacement of a stage | Alex Ka Tim Poon, Leonard Wai Fung Kho, Toru Kawaguchi, Saburo Kamiya, Yasuhiro Hidaka | 2007-10-16 |
| 6405610 | Wafer inspection apparatus | Manabu Komatsu, Kurata Honma, Akitoshi Kawai, Tsuneo Hasegawa | 2002-06-18 |
| 5766720 | Impact vibration absorbers and devices that incorporated them | Masahiro Yamagishi, Takehiro Hirahara | 1998-06-16 |