Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765233 | Method for forming low-carbon CVD film for filling trenches | Atsuki Fukazawa, Hisashi Tazawa | 2014-07-01 |
| 8669185 | Method of tailoring conformality of Si-containing film | Woo Jin Lee, Hideaki Fukuda, Kunitoshi Namba | 2014-03-11 |