Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394608 | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system | Krishna Birru, Leonard Wai Fung Kho, Anand Chandrashekar, Gishun Hsu | 2025-08-19 |
| 12261081 | Tungsten feature fill with inhibition control | Tsung-Han Yang, Michael J. Bowes, Anand Chandrashekar | 2025-03-25 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |
| 12163219 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2024-12-10 |
| 11365479 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2022-06-21 |
| 10760158 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2020-09-01 |
| 10211099 | Chamber conditioning for remote plasma process | Deqi Wang, Anand Chandrashekar, Tsung-Han Yang, John W. Griswold | 2019-02-19 |