Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465305 | Method for determining a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan | 2016-10-11 |
| 9013134 | Method for determing a commutation offset and for determining a compensation map for a stage | Pai-Hsueh Yang, Scott Coakley, Michael Binnard, Kazuhiro Hirano, Bausan Yuan | 2015-04-21 |
| 8451431 | Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like | Pai-Hsueh Yang | 2013-05-28 |
| 7989756 | Active-isolation mounts for optical elements | Yi-Ping Hsin, Hideyuki Hashimoto, Bausan Yuan, Pai-Hsueh Yang | 2011-08-02 |