Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8582080 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Pai-Hsueh Yang, Ting-Chien Teng, Bausan Yuan | 2013-11-12 |
| 7417714 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Michael Binnard, Wen-Hou Ma, Pai-Hsueh Yang, Ting-Chien Teng, Bausan Yuan | 2008-08-26 |
| 6963821 | Stage counter mass system | Michael Binnard, W. Thomas Novak, Bausan Yuan | 2005-11-08 |
| 6686991 | Wafer stage assembly, servo control system, and method for operating the same | Michael Binnard | 2004-02-03 |
| 6618120 | Devices and methods for compensating for tilting of a leveling table in a microlithography apparatus | — | 2003-09-09 |
| 6523695 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | Michael Binnard | 2003-02-25 |
| 6504162 | Stage device, control system, and method for stabilizing wafer stage and wafer table | Michael Binnard | 2003-01-07 |