| 7277220 |
Ultraviolet laser apparatus and exposure apparatus using same |
Soichi Owa |
2007-10-02 |
| 7212275 |
Exposure apparatus with laser device |
— |
2007-05-01 |
| 7136402 |
Laser device and exposure method |
— |
2006-11-14 |
| 7126745 |
Method of irradiating ultraviolet light onto an object |
Soichi Owa |
2006-10-24 |
| 7098992 |
Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device |
Soichi Owa, Niichi Atsumi, Masaaki Doi |
2006-08-29 |
| 7023610 |
Ultraviolet laser apparatus and exposure apparatus using same |
Soichi Owa |
2006-04-04 |
| 6947123 |
Exposure device with laser device |
— |
2005-09-20 |
| 6901090 |
Exposure apparatus with laser device |
— |
2005-05-31 |
| 6590698 |
Ultraviolet laser apparatus and exposure apparatus using same |
Soichi Owa |
2003-07-08 |
| 6339634 |
Soft x-ray light source device |
Noriaki Kandaka, Hiroyuki Kondo, Soichi Owa |
2002-01-15 |
| 6088379 |
Ultraviolet laser apparatus and semiconductor exposure apparatus |
Soichi Owa |
2000-07-11 |
| 6078598 |
Laser apparatus, pulsed laser oscillation method and projection exposure apparatus using the same |
Soichi Owa |
2000-06-20 |
| 6049558 |
Optical elements for guiding laser light and laser systems comprising same |
Masaki Harada, Soichi Owa |
2000-04-11 |
| 5329505 |
System and method for overwriteable magneto-optical recording |
— |
1994-07-12 |
| 5325343 |
Magneto-optical recording medium having two RE-TM layers with the same Curie temperature |
— |
1994-06-28 |
| 5224080 |
Method , apparatus, and medium for magneto-optical recording |
— |
1993-06-29 |
