Issued Patents All Time
Showing 51–75 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8089616 | Pattern forming method and apparatus, exposure method and apparatus, and device manufacturing method and device | — | 2012-01-03 |
| 8072576 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2011-12-06 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo | 2011-10-18 |
| 7952780 | Microactuator, optical device and exposure apparatus, and device manufacturing method | Junji Suzuki | 2011-05-31 |
| 7948604 | Exposure apparatus and method for producing device | — | 2011-05-24 |
| 7932991 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-04-26 |
| 7911583 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-22 |
| 7907254 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-15 |
| 7907253 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2011-03-15 |
| 7589820 | Exposure apparatus and method for producing device | Masahiro Nei, Naoyuki Kobayashi, Dai Arai | 2009-09-15 |
| 7542128 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2009-06-02 |
| 7483119 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Nobutaka Magome, Shigeru Hirukawa, Yoshihiko Kudo, Jiro Inoue, Hiroyuki Nagasaka | 2009-01-27 |
| 7453550 | Exposure apparatus, exposure method, and method for producing device | Hiroyuki Nagasaka, Yasugumi Nishii | 2008-11-18 |
| 7388649 | Exposure apparatus and method for producing device | Naoyuki Kobayashi, Akikazu Tanimoto, Yasushi Mizuno, Kenichi Shiraishi, Katsushi Nakano | 2008-06-17 |
| 7369731 | Optical fiber for amplification, optical amplifying apparatus, light source apparatus, photo-therapy apparatus, and exposure apparatus | Masahiro Takagi, Motoki Kakui, Akira Tokuhisa | 2008-05-06 |
| 7319508 | Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices | Yasuhiro Omura, Naomasa Shiraishi | 2008-01-15 |
| 7301605 | Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices | Yasuhiro Omura, Naomasa Shiraishi | 2007-11-27 |
| 7277220 | Ultraviolet laser apparatus and exposure apparatus using same | Tomoko Ohtsuki | 2007-10-02 |
| 7126745 | Method of irradiating ultraviolet light onto an object | Tomoko Ohtsuki | 2006-10-24 |
| 7098992 | Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device | Tomoko Ohtsuki, Niichi Atsumi, Masaaki Doi | 2006-08-29 |
| 7050149 | Exposure apparatus and exposure method | Naomasa Shiraishi, Takashi Aoki | 2006-05-23 |
| 7023610 | Ultraviolet laser apparatus and exposure apparatus using same | Tomoko Ohtsuki | 2006-04-04 |
| 7008414 | Laser treatment apparatus | Tomoko Ohthuki | 2006-03-07 |
| 6970228 | Exposure method and system | Takashi Aoki | 2005-11-29 |
| 6844915 | Optical system and exposure apparatus provided with the optical system | Naomasa Shiraishi, Issey Tanaka, Yasuhiro Omura | 2005-01-18 |