Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11867621 | Terahertz light detector and terahertz measurement device | — | 2024-01-09 |
| 11757247 | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device | — | 2023-09-12 |
| 11366070 | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device | — | 2022-06-21 |
| 11303091 | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device | — | 2022-04-12 |
| 10559937 | Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device | — | 2020-02-11 |
| 10044160 | Pulsed light generating method, pulse laser apparatus, exposure apparatus having pulse laser apparatus, and inspection apparatus having pulse laser apparatus | Naoto Inaba | 2018-08-07 |
| 9882340 | Laser device, and exposure device and inspection device provided with the laser device | — | 2018-01-30 |
| 9608400 | Laser device, and exposure device and inspection device provided with laser device | — | 2017-03-28 |
| 9383653 | Ultraviolet laser device, and exposure device and inspection device provided with ultraviolet laser device | — | 2016-07-05 |
| 9172204 | Method for adjusting electro-optic modulator in laser device, and laser device | Yasutoshi Takada | 2015-10-27 |
| 9160132 | Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus | Yasutoshi Takada | 2015-10-13 |
| 9153934 | Laser apparatus, light therapy apparatus, exposure apparatus, device manufacturing method, and object inspection apparatus | Yasutoshi Takada | 2015-10-06 |
| 9083151 | Method for having laser light source in standby status | Yasutoshi Takada | 2015-07-14 |
| 8988768 | Laser device | Naoto Inaba | 2015-03-24 |
| 8929410 | Ultraviolet laser device | Yoshinori Oshita | 2015-01-06 |
| 8792083 | Seed light generation device, light source device, adjustment method thereof, light irradiation device, exposure device, and device manufacturing method | Naoto Inaba | 2014-07-29 |
| 8780946 | Ultraviolet laser device | — | 2014-07-15 |
| 8542436 | Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device | — | 2013-09-24 |
| 7974320 | Method for having laser light source in standby status | Yasutoshi Takada | 2011-07-05 |
| 7623557 | Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device | Hitoshi Kawai, Yoshinori Oshita | 2009-11-24 |
| 7397598 | Light source unit and light irradiation unit | Hiroshi Kitano, Hitoshi Kawai | 2008-07-08 |
| 7369731 | Optical fiber for amplification, optical amplifying apparatus, light source apparatus, photo-therapy apparatus, and exposure apparatus | Masahiro Takagi, Motoki Kakui, Soichi Owa | 2008-05-06 |
| 7339961 | Wavelength converting optical system, laser light source, exposure apparatus, device for inspecting object of inspection, and polymer crystal working apparatus | Yoshinori Oshita | 2008-03-04 |
| 7298546 | Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source | Hiroshi Kitano | 2007-11-20 |