Issued Patents All Time
Showing 51–75 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7869000 | Stage assembly with lightweight fine stage and low transmissibility | Yoichi Arai, Andrew J. Hazelton, W. Thomas Novak, Douglas C. Watson, Kirk Lok | 2011-01-11 |
| 7830046 | Damper for a stage assembly | Douglas C. Watson, Jean-Marc Gery | 2010-11-09 |
| 7692768 | Iron core motor driven automatic reticle blind | Douglas C. Watson, Christopher S. Margeson | 2010-04-06 |
| 7656062 | Split coil linear motor for z force | — | 2010-02-02 |
| 7545479 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2009-06-09 |
| 7466396 | Lithography apparatus and method utilizing pendulum interferometer system | Douglas C. Watson, W. Thomas Novak, Hiroto Horikawa, Yoshifumi Nakakoji, Hideaki Sakamoto | 2008-12-16 |
| 7429845 | System and method for controlling a stage assembly | — | 2008-09-30 |
| 7417714 | Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage | Wen-Hou Ma, Toshio Ueta, Pai-Hsueh Yang, Ting-Chien Teng, Bausan Yuan | 2008-08-26 |
| 7414336 | Dual flow circulation system for a mover | — | 2008-08-19 |
| 7372538 | Apparatus and method for maintaining immerison fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2008-05-13 |
| 7368838 | High efficiency voice coil motor | Jean-Marc Gery, Andrew J. Hazelton | 2008-05-06 |
| 7327435 | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | — | 2008-02-05 |
| 6987558 | Reaction mass for a stage device | Bausan Yuan | 2006-01-17 |
| 6987559 | Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same | Alton H. Phillips, Hideaki Sakamoto | 2006-01-17 |
| 6979920 | Circulation housing for a mover | Ed Reynolds, Andrew J. Hazelton | 2005-12-27 |
| 6963821 | Stage counter mass system | W. Thomas Novak, Toshio Ueta, Bausan Yuan | 2005-11-08 |
| 6956308 | Dual flow circulation system for a mover | — | 2005-10-18 |
| 6927505 | Following stage planar motor | Bausan Yuan | 2005-08-09 |
| 6844694 | Stage assembly and exposure apparatus including the same | — | 2005-01-18 |
| 6842226 | Flexure supported wafer table | Douglas C. Watson | 2005-01-11 |
| 6788385 | Stage device, exposure apparatus and method | Keiichi Tanaka, Robert Martinek, Andrew J. Hazelton | 2004-09-07 |
| 6758313 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | — | 2004-07-06 |
| 6750625 | Wafer stage with magnetic bearings | Kazuya Ono, Andrew J. Hazelton | 2004-06-15 |
| 6734947 | Quick chamber seals | Douglas C. Watson | 2004-05-11 |
| 6686991 | Wafer stage assembly, servo control system, and method for operating the same | Toshio Ueta | 2004-02-03 |