Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845720 | Mark detection apparatus, mark detection method, measurement apparatus, exposure apparatus, exposure method and device manufacturing method | Shigeki EGAMI | 2020-11-24 |
| 7466396 | Lithography apparatus and method utilizing pendulum interferometer system | Michael Binnard, Douglas C. Watson, W. Thomas Novak, Hiroto Horikawa, Hideaki Sakamoto | 2008-12-16 |