| 7466396 |
Lithography apparatus and method utilizing pendulum interferometer system |
Michael Binnard, Douglas C. Watson, W. Thomas Novak, Yoshifumi Nakakoji, Hideaki Sakamoto |
2008-12-16 |
| 7081946 |
Holding apparatus, holding method, exposure apparatus and device manufacturing method |
Tsuneyuki Hagiwara, Hiromitsu Yoshimoto, Hideo Mizutani |
2006-07-25 |
| 6721034 |
Stage unit, drive table, and scanning exposure apparatus using the same |
— |
2004-04-13 |
| 6262797 |
Stage unit, drive table, and scanning exposure apparatus using the same |
— |
2001-07-17 |
| 6211946 |
Stage unit, drive table, and scanning exposure apparatus using the same |
Toshiya Ohtomo |
2001-04-03 |
| 6124923 |
Stage unit, drive table, and scanning exposure apparatus using the same |
— |
2000-09-26 |
| 5991005 |
Stage apparatus and exposure apparatus having the same |
Yutaka Hayashi |
1999-11-23 |
| 5850280 |
Stage unit, drive table, and scanning exposure and apparatus using same |
Toshiya Ohtomo |
1998-12-15 |