Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6678038 | Apparatus and methods for detecting tool-induced shift in microlithography apparatus | — | 2004-01-13 |
| 6650079 | System and method to control planar motors | — | 2003-11-18 |
| 6639654 | Wafer stage carrier and removal assembly | Douglas C. Watson | 2003-10-28 |
| 6590639 | Active vibration isolation system having pressure control | Bausan Yuan, Martin E. Lee | 2003-07-08 |
| 6570644 | Connection assembly of wafer stage chamber | Michael Kovalerchik | 2003-05-27 |
| 6551045 | Wafer stage chamber | Andrew J. Hazelton | 2003-04-22 |
| 6523695 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | Toshio Ueta | 2003-02-25 |
| 6504162 | Stage device, control system, and method for stabilizing wafer stage and wafer table | Toshio Ueta | 2003-01-07 |
| 6452292 | Planar motor with linear coil arrays | — | 2002-09-17 |
| 6445093 | Planar motor with linear coil arrays | — | 2002-09-03 |
| 6208045 | Electric motors and positioning devices having moving magnet arrays and six degrees of freedom | Andrew J. Hazelton, Jean-Marc Gery | 2001-03-27 |