Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903346 | Stage assembly having a follower assembly | Michael Sogard, Douglas C. Watson | 2005-06-07 |
| 6781138 | Positioning stage with stationary actuators | W. Thomas Novak | 2004-08-24 |
| 6753534 | Positioning stage with stationary and movable magnet tracks | W. Thomas Novak | 2004-06-22 |
| 6570644 | Connection assembly of wafer stage chamber | Michael Binnard | 2003-05-27 |
| 6515381 | Cantilever stage | W. Thomas Novak | 2003-02-04 |